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high purity Sulfur hexafluoride SF6
Ⅰ.Full name:
Sulfur hexafluoride,Sulfur fluoride.
Ⅱ.Application field
As gas insulator ,refrigerant for electronic device,radar waveguide, particle accelerator, transformer, lightning arrestor etc. As tracing device in medical treatment. As etching in semiconductor manufacturing. Standard gas and leak hunting gas for chemical vapor deposition .As carrier gas for chromatograph.
Ⅲ.Preparation
Prepared by chemical reaction of Sulfur and Nitrogen.
Formula:S+3F2→SF6
Physical and chemical prosperities
Physical prosperities | Pressure(Kpa) | Temperature(°C) | Denisty(kg/m³) |
Liquid state | / | -50.8 | 1880 |
Gaseosness | 101.325 | 0 | 6.52 |
Relative Air | 101.325 | 1.20(Gaseosness) | 5.114 |
Chemical prosperities | Pressure(Kpa) | Temperature(°C) |
Melting point | 224 | -50.8 |
Sublimation Point | 101.325 | -63.7 |
Name | Max acceptable concentration |
Toxicity | 10 ppm(12mg/m³) |
Name | Pressure(Kpa) | Temperature | Specific heat |
Fusion heat | 224 | 222.35K | 34.38 |
Heat of Vaporization | 101.325 | -63.8°C | 161.61 |
Name | Pressure(Kpa) | Temperature | Specific heat(J/kg.k) |
Liquid | 101.325 | 225K | 759.14 |
Gas | / | 25°C | 665.18 |
Name | Temperature(°C) | Pressure(Kpa) |
Vapor pressure | -20 | 680 |
0 | 1250 | |
30 | 2680 |
Viscosity | 101.325(kPa,0°C);0.0142mPa.S(Liquid state,229.85K);0.500mPa S |
Surface tension | (-50°C):11.63mN/m |
Thermal Conductivity | 101.325(kPa,0°C):0.01206W/(mK) |
Refractive index | (0°C,101.325kPa):1.000783 |
Solubility in Water | 5.4cm 3SF4/kg H2O(SF6 101.325kpa,25°C) |
Dielectric Constant | 1002049(Gaseosness,101.325kPa,25 °C),At 21.1°C in S.P.for 2308 kPa. |
Toxicity
Sulfur hexafluoride (SF6) was taken as inert gas in pharmacology. But once contained with SF4,it will be toxic. If people inhalt with high concentration SF6, they will have a series of suffocation symptom,such as difficult to breath , skin and mucous membrane turning to blue and general convulsive seizure.
.Safety Gas container can be leak hunting by soap water. SF6 is non-corrosiveness ,hence it can be contained by stainless,copper,aluminium. Once on fire, it is okay to put off by water and sand. Mixture water with sodium hydroxide and slaked lime can deal with leak gas or just put the leak container into exhaust locker.
high purity Sulfur hexafluoride SF6